EUV Lithography (13.5nm)
13.5nm-wavelength patterning — the technology gate to sub-7nm chips
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Full file coming soon. EUV Lithography (13.5nm)'s links, deals and figures below are what the graph holds today.Not collected yet: 360, Money, Investors, Market share, People and hiring, Legal, News and events, Earnings calls. Anthropic is the first complete company file (people, investors, legal, hiring, birth to now); other companies follow one at a time. Open Anthropic's file
Overview
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L4 Tools · Standard / protocol · chokepoint
EUV Lithography (13.5nm)
13.5nm-wavelength patterning — the technology gate to sub-7nm chips
- Links
- 13
- Deals from filings
- 0
- Exposed if it fails
- 4
- 44 within 2 steps
- It depends on
- 8
- 15 within 2 steps
No company file yet: revenue, customers and other figures appear here once they are taken from its filings.
What it is
Extreme ultraviolet lithography uses 13.5nm-wavelength light generated by vaporizing tin droplets with a high-power CO2 laser, focused by ultra-flat reflective optics in vacuum. It is the enabling technology for every logic node below ~7nm and for advanced DRAM, and no viable alternative exists at scale. Because only ASML can build EUV scanners, EUV is simultaneously a technology node and the hardest chokepoint in the AI hardware stack; High-NA EUV (0.55 numerical aperture) extends the roadmap toward the angstrom era in 2025-2026.
Key facts
from its map entry- Wavelength
- 13.5 nm
- Light source
- Laser-produced tin plasma (Cymer)
- Nodes enabled
- N7/N5/N3/N2 and advanced DRAM
- High-NA aperture
- 0.55 NA
Pick a link to move the graph there: · · · · · · ·
Connections13 links
Pulled 28 Oct 2026 · AI Systems Map links
Its suppliers
8Who depends on it
4Policy
1Compare two: what EUV Lithography (13.5nm) shares with another entity
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Data sources1 source
| Source | Feeds | Data dated | Pulled | Pulled again | Status |
|---|---|---|---|---|---|
| AI Systems Map links13 links; built July 2026, deals re-checked against filings 27 to 28 Oct 2026 | Connections | · | 28 Oct 2026 | when the map is reviewed | hand-built; deals checked against filings |
Times are New York time. Free sources are pulled on the schedule shown by the pipeline runner (data/corpus/run_pipelines.py), which logs every run; paid sources run only with the owner's yes; filings and newsroom pages are re-read when a new document is filed.
Links come from the AI Systems Map ontology. Deals carry the filing's own wording and a quote, checked against the document; latest source 2026-10-26. Not investment advice.