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L4 · ToolsEquipment⬦ ChokepointUSA (San Diego)

Cymer (ASML light source)

EUV light source — laser-produced tin plasma at the heart of every EUV scanner

Cymer, a San Diego company ASML acquired in 2013, develops the EUV light source: a system that fires a high-power CO2 laser at ~50,000 tin droplets per second to create the 13.5nm plasma light. Light-source power and stability were for years the main bottleneck limiting EUV throughput and adoption. As an ASML subsidiary it is a critical, hard-to-replicate node feeding the EUV chokepoint.

Owner

ASML (acquired 2013)

Function

EUV light source (LPP tin plasma)

Droplet rate

~50,000 tin droplets/sec

How it fits the stack

Cymer (ASML light source) with what it depends on (above) and what it feeds (below). The figure renders as a crawlable diagram and upgrades to an interactive 3D graph as it scrolls into view.

depends ondepends onsuppliesCymer (ASML lightsource)ToolsTRUMPFchokepointASML HoldingchokepointEUV Lithography(13.5nm)chokepoint
Cymer (ASML light source)Depends on ↑Feeds ↓

Cymer (ASML light source) in the AI stack. Cymer (ASML light source) with its immediate upstream dependencies (top) and downstream dependents (bottom) in the AI value chain. Hover a node in 3D, or read the full relationships below.

Graph data (text) — 4 entities, 3 relationships
  • Cymer (ASML light source)depends onTRUMPF
  • ASML Holdingdepends onCymer (ASML light source)
  • EUV Lithography (13.5nm)suppliesCymer (ASML light source)