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SMEE (Shanghai Micro Electronics)

China's lithography hope — years behind the leading edge

Shanghai Micro Electronics Equipment (SMEE) is China's only domestic lithography scanner maker and the focal point of Beijing's drive for a homegrown alternative to ASML after EUV and advanced-DUV export bans. Its shipping tools are limited to mature nodes (reportedly ~90nm and improving toward 28nm-class DUV), leaving China many years behind the leading edge. SMEE is central to China's semiconductor self-sufficiency effort but is not yet a viable substitute for ASML.

Role

China's domestic litho champion

Capability

Mature-node DUV (targeting 28nm-class)

Context

Response to US/Dutch EUV+DUV bans

How it fits the stack

SMEE (Shanghai Micro Electronics) with what it depends on (above) and what it feeds (below). The figure renders as a crawlable diagram and upgrades to an interactive 3D graph as it scrolls into view.

competes withcompetes withSMEE (Shanghai MicroElectronics)ToolsASML HoldingCanon & NikonLithography
SMEE (Shanghai Micro Electronics)Related

SMEE (Shanghai Micro Electronics) in the AI stack. SMEE (Shanghai Micro Electronics) with its immediate upstream dependencies (top) and downstream dependents (bottom) in the AI value chain. Hover a node in 3D, or read the full relationships below.

Graph data (text) — 3 entities, 2 relationships
  • SMEE (Shanghai Micro Electronics)competes withASML Holding
  • SMEE (Shanghai Micro Electronics)competes withCanon & Nikon Lithography