Carl Zeiss SMT
Ultra-precise EUV optics — mirrors flat to the atom, exclusive to ASML
Zeiss SMT (Semiconductor Manufacturing Technology) makes the reflective mirror optics inside ASML's EUV scanners — surfaces so precise that, scaled to the size of Germany, no bump would exceed a fraction of a millimeter. ASML holds a strategic stake and Zeiss is the sole supplier of EUV optics, especially the anamorphic High-NA optics that define the next generation. This makes Zeiss SMT an irreplaceable upstream chokepoint feeding the EUV chokepoint itself.
Product
EUV reflective optics/mirrors
Relationship
Sole EUV optics supplier to ASML
High-NA
Anamorphic optics for 0.55 NA
How it fits the stack
Carl Zeiss SMT with what it depends on (above) and what it feeds (below). The figure renders as a crawlable diagram and upgrades to an interactive 3D graph as it scrolls into view.
Carl Zeiss SMT in the AI stack. Carl Zeiss SMT with its immediate upstream dependencies (top) and downstream dependents (bottom) in the AI value chain. Hover a node in 3D, or read the full relationships below.
Graph data (text) — 4 entities, 3 relationships
- ASML High-NA EUV (EXE:5000/5200) —depends on→ Carl Zeiss SMT
- ASML Holding —depends on→ Carl Zeiss SMT
- EUV Lithography (13.5nm) —supplies→ Carl Zeiss SMT