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L4 · ToolsEquipment⬦ ChokepointGermany (Oberkochen)

Carl Zeiss SMT

Ultra-precise EUV optics — mirrors flat to the atom, exclusive to ASML

Zeiss SMT (Semiconductor Manufacturing Technology) makes the reflective mirror optics inside ASML's EUV scanners — surfaces so precise that, scaled to the size of Germany, no bump would exceed a fraction of a millimeter. ASML holds a strategic stake and Zeiss is the sole supplier of EUV optics, especially the anamorphic High-NA optics that define the next generation. This makes Zeiss SMT an irreplaceable upstream chokepoint feeding the EUV chokepoint itself.

Product

EUV reflective optics/mirrors

Relationship

Sole EUV optics supplier to ASML

High-NA

Anamorphic optics for 0.55 NA

How it fits the stack

Carl Zeiss SMT with what it depends on (above) and what it feeds (below). The figure renders as a crawlable diagram and upgrades to an interactive 3D graph as it scrolls into view.

depends ondepends onsuppliesCarl Zeiss SMTToolsASML High-NA EUV(EXE:5000/5200)chokepointASML HoldingchokepointEUV Lithography(13.5nm)chokepoint
Carl Zeiss SMTFeeds ↓

Carl Zeiss SMT in the AI stack. Carl Zeiss SMT with its immediate upstream dependencies (top) and downstream dependents (bottom) in the AI value chain. Hover a node in 3D, or read the full relationships below.

Graph data (text) — 4 entities, 3 relationships
  • ASML High-NA EUV (EXE:5000/5200)depends onCarl Zeiss SMT
  • ASML Holdingdepends onCarl Zeiss SMT
  • EUV Lithography (13.5nm)suppliesCarl Zeiss SMT